Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis

Abstract:

A novel 3D discrete T-shaped electrode array, fabricated by PolymMUMPs, is presented for pumping microscale liquid utilizing AC electro-osmosis (ACEO). Both the theoretical and experimental work has been carried out to evaluate the new design concept. A 3D finite element model of a unit cell incorporating a pair of electrodes is created to simulate pump performance. The new design is prototyped using the PolyMUMPs process and the experimental evaluation of its performance is conducted with saline solution at three different voltages. The maximum velocity obtained from the tracing particles at 30μm above the bottom of the channel was 90μm/s, 130μm/s and 200μm/s for a voltage of 6Vpp, 8Vpp and 10Vpp respectively.

• Periodical: Advanced Materials Research (Volume 254)
• Pages: 78-81
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.254.78
• Online since: May 2011
• Authors: Xin Guo, Yong Jun Lai, Kong Ying Xie, Robert J. Campbell
• Keywords: AC Electro-Osmosis, Micro-Electromechanical System (MEMS), Micro-Fluidics

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