Focused Ion Beam Fabricated Polystyrene-Platinum Thermal Microactuator

Cheng Choo Lee; Gursel Alici; Geoff Spinks; Gwénaëlle Proust; Julie M. Cairney

doi:10.4028/www.scientific.net/AMR.254.86

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 254Focused Ion Beam Fabricated Polystyrene-Platinum...

Focused Ion Beam Fabricated Polystyrene-Platinum Thermal Microactuator

Abstract:

Individually released polystyrene-platinum bimorph microcantilevers that have potential applications as MEMS/NEMS thermal actuators are produced using focused ion beam micromachining technique. The microcantilevers are sharply defined and triangular in cross-section, and are about 20µm long, 2 µm wide and 1.5 µm thick. The fabrication process is fast (< 3 hours) and does not require any mask or resist. The nanometer-scale displacement of the resulting bimorph microactuator with respect to temperature change is recorded via imaging in a scanning electron microscope, equipped with a heating stage. By increasing the temperature to ca. 55 °C, a tip deflection of ca. 380 nm was measured. This result is compared with the numerical result obtained from a finite element analysis (FEA).

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Periodical:

Advanced Materials Research (Volume 254)

Pages:

86-89

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.254.86

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Online since:

May 2011

Authors:

Cheng Choo Lee, Gursel Alici, Geoff Spinks, Gwénaëlle Proust, Julie M. Cairney

Keywords:

Finite Element Analysis (FEA), Focused Ion Beam (FIB), Thermal Microactuator

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