Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants
Pressure sensors using MEMS technology have been advanced due to their low cost, small size and high sensitivity, which is an advantage for biomedical applications. In this paper,silicon nanowire was proposed to be used as the piezoresistors due to the high sensitivity .The sensors were designed, and characterized for the use of medical devices for pressure monitoring. The pressure sensor size is 2mm x 2mm with embedded SiNWs of 90nm x150nm been fabricated. Additionally, the sensitivity of 0.0024 Pa-1 pressure sensor has been demonstrated.
Lynn Khine and Julius M. Tsai
L. S. Lim et al., "Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants", Advanced Materials Research, Vol. 254, pp. 94-98, 2011