Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants

Abstract:

Pressure sensors using MEMS technology have been advanced due to their low cost, small size and high sensitivity, which is an advantage for biomedical applications. In this paper,silicon nanowire was proposed to be used as the piezoresistors due to the high sensitivity [1][2].The sensors were designed, and characterized for the use of medical devices for pressure monitoring. The pressure sensor size is 2mm x 2mm with embedded SiNWs of 90nm x150nm been fabricated. Additionally, the sensitivity of 0.0024 Pa^-1 pressure sensor has been demonstrated.

• Periodical: Advanced Materials Research (Volume 254)
• Pages: 94-98
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.254.94
• Online since: May 2011
• Authors: Li Shiah Lim, Woo Tae Park, Liang Lou, Han Hua Feng, Pushpapraj Singh
• Keywords: Piezoresistive, Silicon Nanowire

References

[1] J.H. Kim, K.T. Park, H.C. Kim, K.Chun. Fabrication Of A Piezoresistive Pressure Sensor For Enhancing Sensitivity Using Silicon Nanowire. Transducers,(2009) , June 21-25, p.1936 – (1939)

DOI: 10.1109/sensor.2009.5285668

[2] Bo Woon Soon, Pavel Neuzil, Chee Chung Wong, Julien Rebound, HanHua Feng, Chengkuo Lee. Ultrasensitive nanowire pressure sensor makes its debut. Proc. Eurosensors XXIV, Vol.5,(2010), September 5-8, pp.1127-1130.

DOI: 10.1016/j.proeng.2010.09.309

[3] Toshiyuki Toriyama, Yasutada Tanimoto, and Susumu Sugiyama, Member, IEEE. Single Crystal Silicon Nano-Wire Piezoresistors for Mechanical Sensors. Journal Of Micromechanical Systems, Vol. 11, No. 5, October,( 2002).

DOI: 10.1109/jmems.2002.802905

[4] Shekhawat, G.; Tark, S.H.; Dravid, V.P. Science 2006, 311, 1592.

[5] Pavel Neuzil, Chee Chung Wong, Julien Rebound. Electrically Controlled Giant Piezoresistance in Silicon Nanowires. Nanoletters,(2010),10(4),pp.1248-1252.

DOI: 10.1021/nl9037856