Key Engineering Materials Vols. 381-382

Abstract: This paper utilizes embedded systems to control an intelligent robot implemented with seven sensor networks. The work was carried out in two phases. The first step developed scanning circuits to feedback the sensor signals to the process systems. The second step installed seven motors and a voice circuit on the robot to respond to the sensor signals. From the results, the proposed embedded system was deemed effective.

Abstract: This paper presents fabrication and characterization of a pressure-sensitive polymeric composite on a flexible readout circuit as an artificial skin. Porous nylon was used as the matrix, which provided skin-like mechanical properties. Inside the matrix, polypyrrole was electrochemically deposited and acted as conductive dopant. The fabrication was detailed. The conductivity of the fabricated composite increased when a compressive load was applied. The electro-mechanical characteristics of the composite were measured.

Abstract: Using phase information of ultrasound transducers outside the main lobe of the radiation pattern enables new sensor principles and improves measurements of type, position and orientation of reflecting objects significantly. This paper presents new methods to measure geometrical object properties by ultrasound, advanced sensor behavior based on phase information, and new effective sensor principles to overcome weaknesses of standard sensors.

Abstract: In this study, we investigate the effect of discharge current on the occurrence of burst AE wave caused by microsecond discharge. Electrical discharge duration was changed from about 1µs to 8µs by using condenser circuit. Effect of current behavior was estimated by comparing with experimental signal and simulation one. AE wave was detected by optical fiber vibration sensor. The optical fiber vibration sensor is located on an aluminum work-piece (cathode) plate. Simulation was carried out with MSC. Marc. As the results, it was found that AE wave was occurred by a force depending on electrical current behavior. The force direction was machining direction. The force has been occurred during microsecond discharge.

Abstract: Time grating displacement sensor is briefly introduced for measuring space with time. The measured values of time grating will not update during the measuring period. To use the sensor as position feedback component for CNC rotary table positioning servo control, this paper firstly introduces prediction conception to measurement field, and predictive measurement method is firstly proposed. Predicted values are derived form past measured values and the prediction error is corrected in real time using the new measured values. The positioning accuracy of the CNC rotary table is improved greatly. Experiment results conform the validity of the proposed method.

Abstract: In the semiconductor industry, a device that can measure the surface-profile of photoresist is needed. Since the photoresist surface is very smooth and deformable, the device is required to measure vertical direction with nanometer resolution and not to damage it at the measurement. We developed the apparatus using multi-cantilever and white light interferometer to measure the surface-profile of thin film. But, this system with scanning method suffers from the presence of moving stage and systematic sensor errors. So, in this paper, an error separation approach used coupled distance sensors, together with an autocollimator as an additional angle measuring device, was consulted the potentiality for self-calibration of multi-cantilever. Then, according to this method, we constructed the experimental apparatus and do the measurement on the resist film. The results demonstrated the feasibility that the constructed multi-ball-cantilever AFM system combined with an autocollimator could measure the thin film with high accuracy.

Abstract: Modern knowledge-intensive branches of industry require industrial intelligent sensors with enhanced metrological reliability. Such sensors are expected to provide many years of operation without maintenance. The specific scientific problems that emerge while developing such sensors are considered. These problems include: experimental evaluation of quality of sensor design and technology; development of on-line strategies for metrological self-checks of sensors as well as of methods to provide self-correction and fault-tolerance. Possible ways of solution of these problems are outlined.

Abstract: Two similar approaches are presented for performing consistency checking of measured data in cases where associated uncertainty values are provided. The key differences between the approaches concern the determination of a consistent subset, and the treatment of measured data deemed to fall outside that subset. The different approaches reflect the priorities of their respective domains of application, namely on-line sensor monitoring, and interlaboratory comparisons.

Abstract: This paper evaluates the validated uncertainty in SEVA sensor by integrating fault detection, identification and reconstruction (FDIR) and reliability engineering. The impact of each fault mode on measurement quality is evaluated quantitatively by using a priori sensor reliability information to investigate the impact of incomplete fault coverage, FDIR and manual maintenance intervention. Bayesian probabilistic approach and uncertainty calculus are employed to model the impact of sensor validation on parameter uncertainty and to fuse the individual modes into a complete sensor model. A simulation of SEVA pressure sensor example illustrates the concept and conclusions.

Abstract: Technical solutions applied to a special complex for measuring position of a control rod in the primary coolant circuit of nuclear reactor are considered. These solutions have provided an increased accuracy, sensitivity, fault-tolerance, and lifetime. The primary transducer lifetime is comparable with reactor lifetime. The measuring complex also carries out developed self-diagnostics and diagnostics of a drive that moves the control rod. The results of the measuring complex use are analyzed.