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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147X-Ray Triple Crystal Diffractometry of Structural...

X-Ray Triple Crystal Diffractometry of Structural Defects in Si_mGe_n Superlattices

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

1325-1330

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.1325

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Online since:

October 1993

Authors:

E. Koppensteiner, P. Hamberger, G.H. Bauer, V. Holy, H. Kibbel, H. Presting, Erich Kasper

Keywords:

mosaicity, Reciprocal Space Mapping (RSM), SiGe Short Period SL's

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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