Passivation of GaAs with Sulphur Surface Treatment and UVCVD Silicon Nitride Cap Layer

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 185-188)

Edited by:

K.E. Heusler

Pages:

179-184

Citation:

H. Sik et al., "Passivation of GaAs with Sulphur Surface Treatment and UVCVD Silicon Nitride Cap Layer", Materials Science Forum, Vols. 185-188, pp. 179-184, 1995

Online since:

March 1995

Export:

Price:

$38.00