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HomeMaterials Science ForumMaterials Science Forum Vols. 185-188Passivation of GaAs with Sulphur Surface Treatment...

Passivation of GaAs with Sulphur Surface Treatment and UVCVD Silicon Nitride Cap Layer

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Passivation of Metals and Semiconductors

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Periodical:

Materials Science Forum (Volumes 185-188)

Pages:

179-184

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.185-188.179

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Online since:

March 1995

Authors:

H. Sik, J.L. Courant, B. Sermage

Keywords:

GaAlAs/GaAs Heterojunction Bipolar Transistor HBT, Sulphur Passivation, Ultra-Violet Chemical Vapour Deposition UVCVD

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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