Composition, Structure and Modification of Passivating Films on Semiconductors Deposited at Low Temperatures

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Periodical:

Materials Science Forum (Volumes 185-188)

Edited by:

K.E. Heusler

Pages:

65-72

DOI:

10.4028/www.scientific.net/MSF.185-188.65

Citation:

M. R. Baklanov and L.L. Vasilyeva, "Composition, Structure and Modification of Passivating Films on Semiconductors Deposited at Low Temperatures", Materials Science Forum, Vols. 185-188, pp. 65-72, 1995

Online since:

March 1995

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$35.00

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