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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Review of the Influence of Micro Crystal Defects...

Review of the Influence of Micro Crystal Defects in Silicon Single Crystals on Gate Oxide Integrity

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1683-1690

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1683

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Online since:

November 1995

Authors:

I. Fusegawa, K. Takano, Kaoru Kimura, N. Fujimaki

Keywords:

Gate Oxide Integrity, Micro Crystal Defect

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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