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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Fundamentals of Point Defect Aggregation and...

Fundamentals of Point Defect Aggregation and Dissolution Phenomena of Crystal Originated Defects in Czochralski Silicon

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1691-1696

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1691

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Online since:

November 1995

Authors:

W. Wijaranakula

Keywords:

COP, Crystal Originated Defects, FP Defects, Point Defect

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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