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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Lifetime Identification of Thermal Oxidation...

Lifetime Identification of Thermal Oxidation Process Induced Contamination in Silicon Wafers

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1817-1822

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1817

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Online since:

November 1995

Authors:

H. Daio, K. Yakushiji, A. Buczkowski, F. Shimura

Keywords:

Metallic Contamination, Minority Carrier Recombination Lifetime, Shockley-Read-Hall Theory, Temperature Dependence, Thermal Oxidation

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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