Transmission Electron Microscopy of LatticeDefects in CZ-Silicon Wafer Formed by Two-Stage Annealing

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Periodical:

Materials Science Forum (Volumes 196-201)

Edited by:

M. Suezawa and H. Katayama-Yoshida

Pages:

1823-1828

DOI:

10.4028/www.scientific.net/MSF.196-201.1823

Citation:

S. Ishikawa et al., "Transmission Electron Microscopy of LatticeDefects in CZ-Silicon Wafer Formed by Two-Stage Annealing", Materials Science Forum, Vols. 196-201, pp. 1823-1828, 1995

Online since:

November 1995

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$35.00

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