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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Photoluminescence Defect Diagnostics in Poly-Si...

Photoluminescence Defect Diagnostics in Poly-Si Thin Films

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1897-1902

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1897

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Online since:

November 1995

Authors:

Sergei S. Ostapenko, A.U. Savchuk, G. Nowak, J. Lagowski, L. Jastrzebski

Keywords:

Defect, Laser Annealing, Photoluminescence (PL), Polycrystalline Silicon

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Сopyright:

© 1995 Trans Tech Publications Ltd. All Rights Reserved

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