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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Photoluminescence Study on Point Defects in SIMOX...

Photoluminescence Study on Point Defects in SIMOX Buried SiO₂ Film

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1909-1914

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1909

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Online since:

November 1995

Authors:

K.S. Seol, A. Ieki, Y. Ohki, Hironobu Nishikawa, M. Tachimori

Keywords:

Photoluminescence (PL), Point Defect, SIMOX

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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