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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201ODMR Investigation of Near-Surface Damage Induced...

ODMR Investigation of Near-Surface Damage Induced by Dry-Etching Process Using GaAs/AlAs Quantum Well Structures

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Abstract:

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1927-1932

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1927

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Online since:

November 1995

Authors:

Yasunori Mochizuki, M. Mizuta, A. Mochizuki

Keywords:

ODMR, Process-Induced Damage, Quantum Well

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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