Characterization of Mg+F, Mg+Ar Dual Ion Implanted AlxGa1-xAs(0≤x≤0.75) Layers

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Periodical:

Materials Science Forum (Volumes 196-201)

Edited by:

M. Suezawa and H. Katayama-Yoshida

Pages:

1943-1948

DOI:

10.4028/www.scientific.net/MSF.196-201.1943

Citation:

N. Hara et al., "Characterization of Mg+F, Mg+Ar Dual Ion Implanted AlxGa1-xAs(0≤x≤0.75) Layers", Materials Science Forum, Vols. 196-201, pp. 1943-1948, 1995

Online since:

November 1995

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