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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Contamination and Cleaning of GaAs-(100) Surfaces

Contamination and Cleaning of GaAs-(100) Surfaces

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1967-1972

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1967

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Online since:

November 1995

Authors:

K. Gutjahr, Manfred Reiche, U.M. Gösele

Keywords:

ATR Measurements, Cleaning, Etching, GaAs-(100) Surfaces, Micro-Roughness

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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