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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Optical and Electrical Characterisation of He...

Optical and Electrical Characterisation of He Plasma Sputtered n-GaAs

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1961-1966

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1961

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Online since:

November 1995

Authors:

M. Murtagh, S. Hildebrandt, P.A.F. Herbert, G.M. O'Connor, G.M. Crean

Keywords:

Capacitance-Voltage Profiling, GaAs, He Plasma Etching, Photoreflectance, RAMAN

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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