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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Substitutional Gettering of Platinum by Diffusion...

Substitutional Gettering of Platinum by Diffusion into Ion-Beam Damaged Silicon

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1985-1990

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1985

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Online since:

November 1995

Authors:

K. Bonde Nielsen, B. Holm

Keywords:

Deep-Level Transient Spectroscopy, Diffusion, Gettering, Implantation Damage, Pt, Silicon

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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