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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268High Temperature Piezoresistive β-SiC-on-SOI...

High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

1101-1106

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.1101

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Online since:

February 1998

Authors:

J. von Berg, R. Ziermann, W. Reichert, E. Obermeier, M. Eickhoff, G. Krötz, U. Thoma, Th. Boltshauser, C. Cavalloni, J.P. Nendza

Keywords:

Combustion Engine, Packaging, Pressure Sensor

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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