High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

1101-1106

DOI:

10.4028/www.scientific.net/MSF.264-268.1101

Citation:

J. von Berg et al., "High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines", Materials Science Forum, Vols. 264-268, pp. 1101-1106, 1998

Online since:

February 1998

Export:

Price:

$35.00

In order to see related information, you need to Login.