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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Characterization of Mechanically Polished Surfaces...

Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

359-362

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.359

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Online since:

February 1998

Authors:

M. Kanaya, Hirokatsu Yashiro, Noboru Ohtani, Masakazu Katsuno, J. Takahashi, S. Shinoyama

Keywords:

Cross-Sectional Transmission Electron Microscopy, Oxidation, Polishing, RBS, Surface Damage

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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