Distribution of Paramagnetic Defects in 3C-SiC Epitaxial Films Grown by LPCVD Method with Alternate Gas Supply
p.619
p.619
Experimental and Theoretical Analysis of the High Temperature Thermal Conductivity of Monocrystalline SiC
p.623
p.623
Deformation of Monocrystalline 6H-SiC
p.627
p.627
Measurement of the Thermal Conductivity of Thin β-SiC Films between 80 K and 600 K
p.631
p.631
Spatial Uniformity of the Mechanical Properties of 3C-SiC Films Grown on 4-Inch Si Wafers as a Function of Film Growth Conditions
p.635
p.635
The Measurement of the Thickness of Thin SiC Layers on Silicon
p.641
p.641
Thickness Contour Mapping of SiC Epi-Films on SiC Substrates
p.645
p.645
Infrared Reflectance of Extremely Thin AlN Epi-Films Deposited on SiC Substrates
p.649
p.649
Cathodoluminescence of Defect Regions in SiC Epi-Films
p.653
p.653
Spatial Uniformity of the Mechanical Properties of 3C-SiC Films Grown on 4-Inch Si Wafers as a Function of Film Growth Conditions
Abstract:
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Periodical:
Materials Science Forum (Volumes 264-268)
Pages:
635-640
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Online since:
February 1998
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© 1998 Trans Tech Publications Ltd. All Rights Reserved
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