The Measurement of the Thickness of Thin SiC Layers on Silicon

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

641-644

DOI:

10.4028/www.scientific.net/MSF.264-268.641

Citation:

V. Cimalla et al., "The Measurement of the Thickness of Thin SiC Layers on Silicon", Materials Science Forum, Vols. 264-268, pp. 641-644, 1998

Online since:

February 1998

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$35.00

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