For Libraries For Publication Open Access Downloads About Us Contact Us
Paper Titles
Deformation of Monocrystalline 6H-SiC
p.627
Measurement of the Thermal Conductivity of Thin β-SiC Films between 80 K and 600 K
p.631
Spatial Uniformity of the Mechanical Properties of 3C-SiC Films Grown on 4-Inch Si Wafers as a Function of Film Growth Conditions
p.635
The Measurement of the Thickness of Thin SiC Layers on Silicon
p.641
Thickness Contour Mapping of SiC Epi-Films on SiC Substrates
p.645
Infrared Reflectance of Extremely Thin AlN Epi-Films Deposited on SiC Substrates
p.649
Cathodoluminescence of Defect Regions in SiC Epi-Films
p.653
Contactless Measurement of the Thermal Conductivity of Thin SiC Layers
p.657
Cross-Sectional Micro-Raman Spectroscopy: A Tool for Structural Investigations of Thin Polytypic SiC Layers
p.661

Thickness Contour Mapping of SiC Epi-Films on SiC Substrates

Article Preview

Abstract:

You might also be interested in these eBooks
Silicon Carbide, III-Nitrides and Related Materials View Preview

Info:

Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

645-648

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.645

Citation:

Cite this paper

Online since:

February 1998

Authors:

Mike F. MacMillan, P.O. Narfgren, Anne Henry, Erik Janzén

Keywords:

Epi-Film Thickness, Reflectance, Thickness Contour Mapping

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1998 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

This article has no references.

© 2025 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied.
Scientific.Net is a registered trademark of Trans Tech Publications Ltd.