Cross-Sectional Micro-Raman Spectroscopy: A Tool for Structural Investigations of Thin Polytypic SiC Layers

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

661-664

DOI:

10.4028/www.scientific.net/MSF.264-268.661

Citation:

T. Werninghaus et al., "Cross-Sectional Micro-Raman Spectroscopy: A Tool for Structural Investigations of Thin Polytypic SiC Layers", Materials Science Forum, Vols. 264-268, pp. 661-664, 1998

Online since:

February 1998

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