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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Contactless Measurement of the Thermal...

Contactless Measurement of the Thermal Conductivity of Thin SiC Layers

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

657-660

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.657

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Online since:

February 1998

Authors:

S. Rohmfeld, Martin Hundhausen, Lothar Ley

Keywords:

Annealing, Chemical Vapor Deposition (CVD), Laser, Raman Spectroscopy, Thermal Conductivity (TC)

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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