Metal-Nitride-Semiconductor Capacitors on 6H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

881-884

Citation:

S. Berberich et al., "Metal-Nitride-Semiconductor Capacitors on 6H-SiC", Materials Science Forum, Vols. 264-268, pp. 881-884, 1998

Online since:

February 1998

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