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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Metal-Nitride-Semiconductor Capacitors on 6H-SiC

Metal-Nitride-Semiconductor Capacitors on 6H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

881-884

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.881

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Online since:

February 1998

Authors:

Stefan Berberich, Philippe Godignon, José Millan, Dominique Planson, H.L. Hartnagel, A. Senes

Keywords:

Charge Instability, Poole-Frenkel Conduction

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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