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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Behaviour of Polycrystalline SiC and Si...

Behaviour of Polycrystalline SiC and Si Surface-Micromachined Lateral Resonant Structures at Elevated Temperatures

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

889-894

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.889

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Online since:

February 1998

Authors:

A.J. Fleischman, S. Roy, Christian A. Zorman, Mehran Mehregany

Keywords:

High-Temperature, Lateral Resonant Structures, Micro-Electromechanical System (MEMS), Surface Micromachining

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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