Behaviour of Polycrystalline SiC and Si Surface-Micromachined Lateral Resonant Structures at Elevated Temperatures

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

889-894

DOI:

10.4028/www.scientific.net/MSF.264-268.889

Citation:

A.J. Fleischman et al., "Behaviour of Polycrystalline SiC and Si Surface-Micromachined Lateral Resonant Structures at Elevated Temperatures", Materials Science Forum, Vols. 264-268, pp. 889-894, 1998

Online since:

February 1998

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