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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Surface Micromachining of Polycrystalline SiC...

Surface Micromachining of Polycrystalline SiC Deposited on SiO₂ by APCVD

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

885-888

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.885

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Online since:

February 1998

Authors:

A.J. Fleischman, X. Wei, Christian A. Zorman, Mehran Mehregany

Keywords:

APCVD, Micro-Electromechanical System (MEMS), Silicon Carbide-on-Oxide, Surface Micromachining

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Сopyright:

© 1998 Trans Tech Publications Ltd. All Rights Reserved

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