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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Rapid Anodic Oxidation of 6H-SiC

Rapid Anodic Oxidation of 6H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

873-876

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.873

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Online since:

February 1998

Authors:

Yuri I. Khlebnikov, V. Madangarli, M.A. Khan, Tangali S. Sudarshan

Keywords:

Anodic Oxidation, Gate-Oxide, MOS Capacitor

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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