Al/Si Ohmic Contacts to p-Type 4H-SiC for Power Devices

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

1009-1012

DOI:

10.4028/www.scientific.net/MSF.338-342.1009

Citation:

L. Kassamakova et al., "Al/Si Ohmic Contacts to p-Type 4H-SiC for Power Devices", Materials Science Forum, Vols. 338-342, pp. 1009-1012, 2000

Online since:

May 2000

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$35.00

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