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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Effect of Off-Angle from Si (0001) Surface and...

Effect of Off-Angle from Si (0001) Surface and Polytype on Surface Morphology of SiC and C-V Characteristics of SiC MOS Structures

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

1283-1286

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.1283

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Online since:

May 2000

Authors:

Kenji Fukuda, Seiji Suzuki, Junji Senzaki, Ryouji Kosugi, Kiyoko Nagai, Toshihiro Sekigawa, Hideyo Okushi, Sadafumi Yoshida, Tomoyuki Tanaka, Kazuo Arai

Keywords:

C-V Characteristics, MOS Structure, Off-Angle, Polytype, Surface Morphology

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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