Structural Investigations of the Nucleation and Growth of SiC during Rapid Thermal Conversion of (111)Si

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

285-288

DOI:

10.4028/www.scientific.net/MSF.338-342.285

Citation:

V. Cimalla et al., "Structural Investigations of the Nucleation and Growth of SiC during Rapid Thermal Conversion of (111)Si", Materials Science Forum, Vols. 338-342, pp. 285-288, 2000

Online since:

May 2000

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$38.00

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