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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Carbonization of SIMOX Substrates for Fabrication...

Carbonization of SIMOX Substrates for Fabrication of Single-crystal SiC-on-insulator

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

297-300

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.297

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Online since:

May 2000

Authors:

Shinsuke Harada, M. Arita, Yoshifumi Ikoma, Teruaki Motooka

Keywords:

Carbonization, Chemical Vapor Deposition (CVD), SiC-on-insulator, SIMOX, TEM

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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