Carbonization of SIMOX Substrates for Fabrication of Single-crystal SiC-on-insulator

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

297-300

DOI:

10.4028/www.scientific.net/MSF.338-342.297

Citation:

S. Harada et al., "Carbonization of SIMOX Substrates for Fabrication of Single-crystal SiC-on-insulator", Materials Science Forum, Vols. 338-342, pp. 297-300, 2000

Online since:

May 2000

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$35.00

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