SOL Thinning Effects on 3C-SiC on SOI*

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

301-304

DOI:

10.4028/www.scientific.net/MSF.338-342.301

Citation:

N. Planes et al., "SOL Thinning Effects on 3C-SiC on SOI*", Materials Science Forum, Vols. 338-342, pp. 301-304, 2000

Online since:

May 2000

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Price:

$35.00

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