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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Studies of the Initial Stages of Silicon Carbide...

Studies of the Initial Stages of Silicon Carbide Growth using Molecular Hydrocarbon and Methyl Radical Gas Species

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

293-296

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.293

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Online since:

May 2000

Authors:

J.S. Gold, J.S. Lannon, Jr., V.L. Tolani, K.S. Ziemer, C.D. Stinespring

Keywords:

Methyl Radicals, Molecular Growth Species, Surface Reactions, Thin Film Growth

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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