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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Optical Characterization of Lattice Damage and...

Optical Characterization of Lattice Damage and Recovery in Ion-Implanted and Pulsed Excimer Laser Irradiated 4H-SiC

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

655-658

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.655

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Online since:

May 2000

Authors:

D. Sands, P.H. Key, M. Schlaf, C.D. Walton, C.J. Anthony, Michael J. Uren

Keywords:

Contact Preparation, Infrared, Laser Annealing, Lattice Recovery, Reflectivity, Reststrahlen Band

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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