Optical Characterization of Lattice Damage and Recovery in Ion-Implanted and Pulsed Excimer Laser Irradiated 4H-SiC

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

655-658

DOI:

10.4028/www.scientific.net/MSF.338-342.655

Citation:

D. Sands et al., "Optical Characterization of Lattice Damage and Recovery in Ion-Implanted and Pulsed Excimer Laser Irradiated 4H-SiC", Materials Science Forum, Vols. 338-342, pp. 655-658, 2000

Online since:

May 2000

Export:

Price:

$35.00

In order to see related information, you need to Login.