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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Photoluminescence and DLTS Measurements of 15MeV...

Photoluminescence and DLTS Measurements of 15MeV Erbium Implanted 6H and 4H SiC

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

639-642

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.639

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Online since:

May 2000

Authors:

Y. Shishkin, Wolfgang J. Choyke, Robert P. Devaty, N. Achtziger, Th. Opfermann, W. Witthuhn

Keywords:

1.54μm Luminescence, Deep Level, DLTS, Erbium, Implantation

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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