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Microscopic Probing of Raman Scattering and Photoluminescence on C-Al Ion Co-Implanted 6H-SiC
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Ion Beam Induced Change in the Linear Optical Properties of SiC
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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Microscopic Probing of Raman Scattering and...

Microscopic Probing of Raman Scattering and Photoluminescence on C-Al Ion Co-Implanted 6H-SiC

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

659-662

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.659

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Online since:

May 2000

Authors:

Zhe Chuan Feng, Soo Jin Chua, Ze Xiang Shen, Kiyoshi Tone, Jian Hui Zhao

Keywords:

6H-SiC, Annealing, Ion Implantation, Photoluminescence (PL), RAMAN

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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