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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Confocal Raman Microprobe of Lattice Damage in N+...

Confocal Raman Microprobe of Lattice Damage in N⁺ Implanted 6H-SiC

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

663-666

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.663

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Online since:

May 2000

Authors:

Narcis Mestres, F. Alsina, F.J. Campos, Jordi Pascual, Erwan Morvan, Philippe Godignon, José Millan

Keywords:

Ion Implantation, Radiation Damage, Raman Scattering

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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