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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Electrical Characteristics and Surface Morphology...

Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

865-868

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.865

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Online since:

May 2000

Authors:

Junji Senzaki, Kenji Fukuda, Seiji Imai, Yasunori Tanaka, Naoto Kobayashi, Hisao Tanoue, Hideyo Okushi, Kazuo Arai

Keywords:

Arsenic, Depth Profile, High Temperature Ion-Implantation, Surface Morphology

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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