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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Al and Al/C High Dose Implantation in 4H-SiC

Al and Al/C High Dose Implantation in 4H-SiC

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

885-888

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.885

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Online since:

May 2000

Authors:

Jean Marie Bluet, Julien Pernot, Thierry Billon, Sylvie Contreras, J.F. Michaud, Jean-Louis Robert, Jean Camassel

Keywords:

Al and Al/C Implantation, Hall Measurement, P-N Junction, Sheet Resistance

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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