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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Selective Doping of 6H-SiC by Diffusion of Boron

Selective Doping of 6H-SiC by Diffusion of Boron

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

945-948

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.945

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Online since:

May 2000

Authors:

Stanislav I. Soloviev, Ying Gao, I.I. Khlebnikov, Tangali S. Sudarshan

Keywords:

Cathodoluminescence, Diffusion, Graphite Mask, Photoluminescence (PL), Selective Doping

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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