Modeling Analysis of SiC CVD in a Planetary Reactor

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Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

103-106

Citation:

A.N. Vorob'ev et al., "Modeling Analysis of SiC CVD in a Planetary Reactor", Materials Science Forum, Vols. 353-356, pp. 103-106, 2001

Online since:

January 2001

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$38.00

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