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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Influence of Silicon Gas-to-Particle Conversion on...

Influence of Silicon Gas-to-Particle Conversion on SiC CVD in a Cold-Wall Rotating-Disc Reactor

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

107-110

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.107

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Online since:

January 2001

Authors:

A.N. Vorob'ev, M.V. Bogdanov, A.E. Komissarov, S.Yu. Karpov, O.V. Bord, A.A. Lovtsus, Yuri Makarov

Keywords:

C/Si Ratio, Gas Phase Nucleation, Growth Rate, Secondary Phase Formation

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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