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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Control of Surface Morphologies for Epitaxial...

Control of Surface Morphologies for Epitaxial Growth on Low Off-Angle 4H-SiC (0001) Substrates

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

135-138

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.135

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Online since:

January 2001

Authors:

Koh Masahara, Mitsuhiro Kushibe, H. Ohno, Kazutoshi Kojima, Tetsuo Takahashi, Yuuki Ishida, Takaya Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai

Keywords:

Low Off-Angled Substrate, Pre-Growth Etching, Surface Morphology

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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