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Room Temperature Initial Oxidation of 6H- and 4H-SiC(0001) 3x3
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Comparison of HF and Ozone Treated SiC Surfaces
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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Preparation and Characterization of Hydrogen...

Preparation and Characterization of Hydrogen Terminated 6H-SiC

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

223-226

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.223

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Online since:

January 2001

Authors:

N. Sieber, Thomas Seyller, B.F. Mantel, Jürgen Ristein, Lothar Ley

Keywords:

Band Bending, Hydrogen Termination, Infrared Spectroscopy, Photoelectron Spectroscopy

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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