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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Investigation of the SiC Surface after Nitrogen...

Investigation of the SiC Surface after Nitrogen Plasma Treatment

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

239-242

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.239

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Online since:

January 2001

Authors:

L.A. Bereznjakova, A.V. Shchukarev, V.I. Ivanov-Omskii

Keywords:

Chemical Bonding, Etching, Layer-by-Layer Analysis, Nitrogen Plasma, SiC_xN_1-x, Surface Morphology, X-Ray Photoelectron Spectroscopy (XPS)

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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