Investigation of the SiC Surface after Nitrogen Plasma Treatment

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Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

239-242

DOI:

10.4028/www.scientific.net/MSF.353-356.239

Citation:

L.A. Bereznjakova et al., "Investigation of the SiC Surface after Nitrogen Plasma Treatment", Materials Science Forum, Vols. 353-356, pp. 239-242, 2001

Online since:

January 2001

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$35.00

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