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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Polytype Dependence of Transition Metal-Related...

Polytype Dependence of Transition Metal-Related Deep Levels in 4H-, 6H- and 15R-SiC

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

573-576

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.573

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Online since:

April 2002

Authors:

Joachim Grillenberger, N. Achtziger, G. Pasold, W. Witthuhn

Keywords:

Chromium, Deep Level, DLTS, Level Split, Polytype Dependence, Radiotracer, Tantalum, Titanium (Ti), Transition Metal, Tungsten, Vanadium

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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