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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Aluminum and Boron Diffusion into (1-100) Face SiC...

Aluminum and Boron Diffusion into (1-100) Face SiC Substrates

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

557-560

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.557

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Online since:

April 2002

Authors:

Stanislav I. Soloviev, Ying Gao, Yuri I. Khlebnikov, I.I. Khlebnikov, Tangali S. Sudarshan

Keywords:

C-Face, Diffusion, Diffusion Coefficient, SIMS

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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