Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11-20), (1-100), and (0001) Oriented 6H-SiC

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

843-846

DOI:

10.4028/www.scientific.net/MSF.389-393.843

Citation:

O. Eryu et al., "Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11-20), (1-100), and (0001) Oriented 6H-SiC", Materials Science Forum, Vols. 389-393, pp. 843-846, 2002

Online since:

April 2002

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